From MEMS to Bio-MEMS and Bio-NEMS

Explore the fascinating world of micro and nanoscale technology with From MEMS to Bio-MEMS and Bio-NEMS by Marc J. Madou. Published by Taylor & Francis Inc in 2011, this comprehensive hardback spans 654 pages, meticulously detailing the manufacturing techniques vital to bio-nanotechnology.

This insightful text delves into MEMS (Micro-Electro-Mechanical Systems) techniques, materials, and modeling, providing a thorough review of nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. It also addresses critical topics such as scaling laws in MEMS and NEMS, actuators, fluidics, and the integration of power and intelligence in miniature devices.

Perfect for professionals, researchers, and students in the fields of material science and nanotechnology, this book serves as an essential resource for understanding the cutting-edge developments in the rapidly evolving landscape of microelectronics.